diff --git a/cmake/cinn.cmake b/cmake/cinn.cmake
index e2ab8c6c5c9f31354ebc742292aa5a843f9f5597..ff3731f380540b85ad25ded1837c98cdeb247c5c 100644
--- a/cmake/cinn.cmake
+++ b/cmake/cinn.cmake
@@ -331,7 +331,7 @@ set(ABSL_INCLUDE_DIR "${CMAKE_BINARY_DIR}/dist/third_party/absl/include")
 include_directories(${ABSL_INCLUDE_DIR})
 
 # Add isl
-set(ISL_INCLUDE_DIR "${CMAKE_BINARY_DIR}/dist/third_party/isl/include")
+set(ISL_INCLUDE_DIR "${CMAKE_BINARY_DIR}/third_party/install/isl/include")
 include_directories(${ISL_INCLUDE_DIR})
 
 # Add LLVM
diff --git a/cmake/cinn/external/isl.cmake b/cmake/cinn/external/isl.cmake
index da957c6f632b85abed76ec93ed837e4852e24bf6..6c05e425b4831e668074652492b51348f392d1b2 100644
--- a/cmake/cinn/external/isl.cmake
+++ b/cmake/cinn/external/isl.cmake
@@ -7,25 +7,62 @@ include(ExternalProject)
 # static build
 # CPPFLAGS="-fPIC -DPIC" ./configure --with-gmp-prefix=<gmp-install-path> --with-clang-prefix=<llvm-install-path> --enable-shared=no --enable-static=yes
 
+set(ISL_FILE
+    "isl-6a1760fe.tar.gz"
+    CACHE STRING "" FORCE)
 set(ISL_DOWNLOAD_URL
-    https://paddle-inference-dist.bj.bcebos.com/CINN/isl-6a1760fe.tar.gz)
-set(ISL_MD5 fff10083fb79d394b8a7b7b2089f6183)
+    "https://paddle-inference-dist.bj.bcebos.com/CINN/${ISL_FILE}")
+set(ISL_URL_MD5 fff10083fb79d394b8a7b7b2089f6183)
+set(ISL_DOWNLOAD_DIR ${PADDLE_SOURCE_DIR}/third_party/isl)
+set(ISL_PREFIX_DIR ${THIRD_PARTY_PATH}/isl)
+set(ISL_INSTALL_DIR ${THIRD_PARTY_PATH}/install/isl)
+
+function(download_isl)
+  message(
+    STATUS "Downloading ${ISL_DOWNLOAD_URL} to ${ISL_DOWNLOAD_DIR}/${ISL_FILE}")
+  file(
+    DOWNLOAD ${ISL_DOWNLOAD_URL} ${ISL_DOWNLOAD_DIR}/${ISL_FILE}
+    EXPECTED_MD5 ${ISL_URL_MD5}
+    STATUS ERR)
+  if(ERR EQUAL 0)
+    message(STATUS "Download ${ISL_FILE} success")
+  else()
+    message(
+      FATAL_ERROR
+        "Download failed, error: ${ERR}\n You can try downloading ${ISL_FILE} again"
+    )
+  endif()
+endfunction()
+
+# Download and check isl.
+if(EXISTS ${ISL_DOWNLOAD_DIR}/${ISL_FILE})
+  file(MD5 ${ISL_DOWNLOAD_DIR}/${ISL_FILE} ISL_MD5)
+  if(NOT ISL_MD5 STREQUAL ISL_URL_MD5)
+    # clean build file
+    file(REMOVE_RECURSE ${ISL_PREFIX_DIR})
+    file(REMOVE_RECURSE ${ISL_INSTALL_DIR})
+    download_isl()
+  endif()
+else()
+  download_isl()
+endif()
 
 ExternalProject_Add(
   external_isl
   ${EXTERNAL_PROJECT_LOG_ARGS}
-  URL ${ISL_DOWNLOAD_URL}
-  URL_MD5 ${ISL_MD5}
-  PREFIX ${THIRD_PARTY_PATH}/isl
-  SOURCE_DIR ${THIRD_PARTY_PATH}/install/isl
+  URL ${ISL_DOWNLOAD_DIR}/${ISL_FILE}
+  URL_MD5 ${ISL_URL_MD5}
+  DOWNLOAD_DIR ${ISL_DOWNLOAD_DIR}
+  PREFIX ${ISL_PREFIX_DIR}
+  SOURCE_DIR ${ISL_INSTALL_DIR}
   CONFIGURE_COMMAND ""
   BUILD_COMMAND ""
   UPDATE_COMMAND ""
   INSTALL_COMMAND ""
-  BUILD_BYPRODUCTS ${THIRD_PARTY_PATH}/install/isl/lib/libisl.a)
+  BUILD_BYPRODUCTS ${ISL_INSTALL_DIR}/lib/libisl.a)
 
 add_library(isl STATIC IMPORTED GLOBAL)
 set_property(TARGET isl PROPERTY IMPORTED_LOCATION
-                                 ${THIRD_PARTY_PATH}/install/isl/lib/libisl.a)
+                                 ${ISL_INSTALL_DIR}/lib/libisl.a)
 add_dependencies(isl external_isl)
-include_directories(${THIRD_PARTY_PATH}/install/isl/include)
+include_directories(${ISL_INSTALL_DIR}/include)