diff --git a/cmake/OpenCVFindLibsPerf.cmake b/cmake/OpenCVFindLibsPerf.cmake
index b94c357699fd038e09bc17a16401e55d4977faca..72b4ba6f7f2beb9b1dafa4f90965093df841e7ef 100644
--- a/cmake/OpenCVFindLibsPerf.cmake
+++ b/cmake/OpenCVFindLibsPerf.cmake
@@ -49,8 +49,9 @@ endif()
 # --- OpenMP ---
 if(NOT HAVE_TBB AND NOT HAVE_CSTRIPES)
   set(_fname "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/omptest.cpp")
-  FILE(WRITE "${_fname}" "#ifndef _OPENMP\n#error\n#endif\nint main() { return 0; }\n")
-  TRY_COMPILE(HAVE_OPENMP "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp" "${_fname}")
+  file(WRITE "${_fname}" "#ifndef _OPENMP\n#error\n#endif\nint main() { return 0; }\n")
+  try_compile(HAVE_OPENMP "${CMAKE_BINARY_DIR}" "${_fname}")
+  file(REMOVE "${_fname}")
 else()
   set(HAVE_OPENMP 0)
 endif()
@@ -65,8 +66,9 @@ endif()
 # --- Concurrency ---
 if(MSVC AND NOT HAVE_TBB AND NOT HAVE_CSTRIPES AND NOT HAVE_OPENMP)
   set(_fname "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/concurrencytest.cpp")
-  FILE(WRITE "${_fname}" "#if _MSC_VER < 1600\n#error\n#endif\nint main() { return 0; }\n")
-  TRY_COMPILE(HAVE_CONCURRENCY "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp" "${_fname}")
+  file(WRITE "${_fname}" "#if _MSC_VER < 1600\n#error\n#endif\nint main() { return 0; }\n")
+  try_compile(HAVE_CONCURRENCY "${CMAKE_BINARY_DIR}" "${_fname}")
+  file(REMOVE "${_fname}")
 else()
   set(HAVE_CONCURRENCY 0)
 endif()