diff --git a/CMakeLists.txt b/CMakeLists.txt
index eaec3883e2944e0b4eaf0016c39240ffd07a1eee..50070c7fc05133da758650eb5ac50e32effe63c9 100755
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -12,8 +12,14 @@
 # See the License for the specific language governing permissions and
 # limitations under the License
 
-cmake_minimum_required(VERSION 3.10)
-cmake_policy(VERSION 3.10)
+if(APPLE AND WITH_ARM)
+    # cmake 3.19.2 version starts to support M1
+    cmake_minimum_required(VERSION 3.19.2)
+    cmake_policy(VERSION 3.19.2)
+else(APPLE AND WITH_ARM)
+    cmake_minimum_required(VERSION 3.10)
+    cmake_policy(VERSION 3.10)
+endif(APPLE AND WITH_ARM)
 set(CMAKE_MODULE_PATH ${CMAKE_MODULE_PATH} "${CMAKE_CURRENT_SOURCE_DIR}/cmake")
 set(PADDLE_SOURCE_DIR ${CMAKE_CURRENT_SOURCE_DIR})
 set(PADDLE_BINARY_DIR ${CMAKE_CURRENT_BINARY_DIR})
@@ -73,6 +79,11 @@ if(WITH_MUSL)
     set(CMAKE_CXX_FLAGS "${CMAKE_CXX_FLAGS} -Wno-error=deprecated-declarations -Wno-deprecated-declarations -Wno-error=pessimizing-move -Wno-error=deprecated-copy")
 endif()
 
+if(APPLE AND WITH_ARM)
+    set(CMAKE_C_FLAGS "${CMAKE_C_FLAGS} -target arm64-apple-darwin")
+    set(CMAKE_CXX_FLAGS "${CMAKE_C_FLAGS} -target arm64-apple-darwin")
+endif()
+
 if(WITH_ASCEND_CL AND NOT WITH_ASCEND_CXX11)
     set(CMAKE_CXX_FLAGS  "${CMAKE_CXX_FLAGS} -D_GLIBCXX_USE_CXX11_ABI=0")
 endif()
@@ -332,8 +343,9 @@ endif()
 if(WITH_ARM)
     set(CMAKE_C_FLAGS "${CMAKE_C_FLAGS} -fPIC")
     set(CMAKE_CXX_FLAGS "${CMAKE_CXX_FLAGS} -fPIC")
-    set(WITH_XBYAK OFF CACHE STRING "Disable XBYAK when compiling WITH_ARM=ON" FORCE)
+    set(WITH_XBYAK OFF CACHE STRING "Disable XBYAK when compiling WITH_ARM=ON." FORCE)
     set(WITH_MKL OFF CACHE STRING "Disable MKL when compiling WITH_ARM=ON." FORCE)
+    set(WITH_AVX OFF CACHE STRING "Disable AVX when compiling WITH_AVX=OFF." FORCE)
     add_definitions(-DPADDLE_WITH_ARM)
 endif()
 
diff --git a/cmake/external/cryptopp.cmake b/cmake/external/cryptopp.cmake
index f7f7a9b52e895dcfb39860331161d902080fe4c6..aedd40aec68481e1a92924bcd484384ecdd87d88 100644
--- a/cmake/external/cryptopp.cmake
+++ b/cmake/external/cryptopp.cmake
@@ -33,6 +33,10 @@ ELSE(WIN32)
   SET(CRYPTOPP_LIBRARIES "${CRYPTOPP_INSTALL_DIR}/lib/libcryptopp.a" CACHE FILEPATH "cryptopp library." FORCE)
 ENDIF(WIN32)
 
+IF(APPLE AND WITH_ARM)
+  SET(CMAKE_CXX_FLAGS "-DCRYPTOPP_ARM_CRC32_AVAILABLE=0")
+ENDIF()
+
 set(CRYPTOPP_CMAKE_ARGS ${COMMON_CMAKE_ARGS}
                         -DBUILD_SHARED=ON
                         -DBUILD_STATIC=ON
diff --git a/cmake/external/openblas.cmake b/cmake/external/openblas.cmake
index 19ba6d15c59ea802cc94ea6138871c15cb49077b..a6033a20c6fb06c6e6b26100c1997b7881767e85 100644
--- a/cmake/external/openblas.cmake
+++ b/cmake/external/openblas.cmake
@@ -19,6 +19,10 @@ SET(CBLAS_SOURCE_DIR  ${THIRD_PARTY_PATH}/openblas/src/extern_openblas)
 SET(CBLAS_INSTALL_DIR ${THIRD_PARTY_PATH}/install/openblas)
 SET(CBLAS_REPOSITORY  ${GIT_URL}/xianyi/OpenBLAS.git)
 SET(CBLAS_TAG         v0.3.7)
+if(APPLE AND WITH_ARM)
+  SET(CBLAS_TAG         v0.3.13)
+endif()
+
 if(WITH_MIPS)
   SET(CBLAS_TAG         v0.3.13)
 endif()
diff --git a/cmake/flags.cmake b/cmake/flags.cmake
index 94fd29b905009ba1202abdb184d7c35b185489e5..7afff25664bbbb6f8ac93392dc39ed621e57e849 100644
--- a/cmake/flags.cmake
+++ b/cmake/flags.cmake
@@ -186,8 +186,11 @@ endif()
 endif(NOT WIN32)
 
 if (APPLE)
-    # On Mac OS X build fat binaries with x86_64 architectures by default.
-    set (CMAKE_OSX_ARCHITECTURES "x86_64" CACHE STRING "Build architectures for OSX" FORCE)
+    if(WITH_ARM)
+      set (CMAKE_OSX_ARCHITECTURES "arm64" CACHE STRING "Build architectures for OSX" FORCE)
+    else(WITH_ARM)
+     set (CMAKE_OSX_ARCHITECTURES "x86_64" CACHE STRING "Build architectures for OSX" FORCE)
+    endif(WITH_ARM)
     # On Mac OS X register class specifier is deprecated and will cause warning error on latest clang 10.0
     set (COMMON_FLAGS -Wno-deprecated-register)
 endif(APPLE)