diff --git a/paddle/fluid/inference/api/analysis_predictor.cc b/paddle/fluid/inference/api/analysis_predictor.cc
old mode 100644
new mode 100755
index 618de300fcb022f282faa7a5e48ad2ea14d87f3d..0a8b3d5eb29ed30b5374b89ce7829dfe2f7ebab8
--- a/paddle/fluid/inference/api/analysis_predictor.cc
+++ b/paddle/fluid/inference/api/analysis_predictor.cc
@@ -2246,6 +2246,7 @@ USE_TRT_CONVERTER(flatten_contiguous_range);
 USE_TRT_CONVERTER(matmul);
 USE_TRT_CONVERTER(matmul_v2);
 USE_TRT_CONVERTER(bmm);
+USE_TRT_CONVERTER(rsqrt);
 USE_TRT_CONVERTER(conv2d);
 USE_TRT_CONVERTER(relu);
 USE_TRT_CONVERTER(exp);
diff --git a/paddle/fluid/inference/tensorrt/convert/CMakeLists.txt b/paddle/fluid/inference/tensorrt/convert/CMakeLists.txt
old mode 100644
new mode 100755
diff --git a/paddle/fluid/inference/tensorrt/convert/unary_op.cc b/paddle/fluid/inference/tensorrt/convert/unary_op.cc
index 565afd214aeea608b7817f6144817369ed5a4b4f..cbf2139a3c48368d1039d6b78c68fbd2faba61c5 100644
--- a/paddle/fluid/inference/tensorrt/convert/unary_op.cc
+++ b/paddle/fluid/inference/tensorrt/convert/unary_op.cc
@@ -52,38 +52,47 @@ class UnaryOpConverter : public OpConverter {
     nvinfer1::ITensor* input_tensor =
         engine_->GetITensor(op_desc.Input("X")[0]);
     auto op_pair = ops.find(op_type_);
-    nvinfer1::IUnaryLayer* layer =
-        TRT_ENGINE_ADD_LAYER(engine_, Unary, *input_tensor, op_pair->second);
+
+    nvinfer1::IUnaryLayer* layer = nullptr;
+    for (auto trt_op : op_pair->second) {
+      layer = TRT_ENGINE_ADD_LAYER(engine_, Unary, *input_tensor, trt_op);
+      input_tensor = layer->getOutput(0);
+    }
+
     auto output_name = op_desc.Output("Out")[0];
     RreplenishLayerAndOutput(layer, op_type_, {output_name}, test_mode);
   }
 
  protected:
   std::string op_type_;
-  static const std::unordered_map<std::string, nvinfer1::UnaryOperation> ops;
+  static const std::unordered_map<std::string,
+                                  std::vector<nvinfer1::UnaryOperation>>
+      ops;
 };
 
-const std::unordered_map<std::string, nvinfer1::UnaryOperation>
+const std::unordered_map<std::string, std::vector<nvinfer1::UnaryOperation>>
     UnaryOpConverter::ops = {
-        {"exp", nvinfer1::UnaryOperation::kEXP},
-        {"log", nvinfer1::UnaryOperation::kLOG},
-        {"sqrt", nvinfer1::UnaryOperation::kSQRT},
-        {"abs", nvinfer1::UnaryOperation::kABS},
-        {"sin", nvinfer1::UnaryOperation::kSIN},
-        {"cos", nvinfer1::UnaryOperation::kCOS},
-        {"tan", nvinfer1::UnaryOperation::kTAN},
-        {"sinh", nvinfer1::UnaryOperation::kSINH},
-        {"cosh", nvinfer1::UnaryOperation::kCOSH},
-        {"asin", nvinfer1::UnaryOperation::kASIN},
-        {"acos", nvinfer1::UnaryOperation::kACOS},
-        {"atan", nvinfer1::UnaryOperation::kATAN},
-        {"asinh", nvinfer1::UnaryOperation::kASINH},
-        {"atanh", nvinfer1::UnaryOperation::kATANH},
-        {"ceil", nvinfer1::UnaryOperation::kCEIL},
-        {"floor", nvinfer1::UnaryOperation::kFLOOR},
-        {"reciprocal", nvinfer1::UnaryOperation::kRECIP},
+        {"exp", {nvinfer1::UnaryOperation::kEXP}},
+        {"log", {nvinfer1::UnaryOperation::kLOG}},
+        {"sqrt", {nvinfer1::UnaryOperation::kSQRT}},
+        {"abs", {nvinfer1::UnaryOperation::kABS}},
+        {"sin", {nvinfer1::UnaryOperation::kSIN}},
+        {"cos", {nvinfer1::UnaryOperation::kCOS}},
+        {"tan", {nvinfer1::UnaryOperation::kTAN}},
+        {"sinh", {nvinfer1::UnaryOperation::kSINH}},
+        {"cosh", {nvinfer1::UnaryOperation::kCOSH}},
+        {"asin", {nvinfer1::UnaryOperation::kASIN}},
+        {"acos", {nvinfer1::UnaryOperation::kACOS}},
+        {"atan", {nvinfer1::UnaryOperation::kATAN}},
+        {"asinh", {nvinfer1::UnaryOperation::kASINH}},
+        {"atanh", {nvinfer1::UnaryOperation::kATANH}},
+        {"ceil", {nvinfer1::UnaryOperation::kCEIL}},
+        {"floor", {nvinfer1::UnaryOperation::kFLOOR}},
+        {"rsqrt",
+         {nvinfer1::UnaryOperation::kSQRT, nvinfer1::UnaryOperation::kRECIP}},
+        {"reciprocal", {nvinfer1::UnaryOperation::kRECIP}},
 #if IS_TRT_VERSION_GE(7000)
-        {"erf", nvinfer1::UnaryOperation::kERF},
+        {"erf", {nvinfer1::UnaryOperation::kERF}},
 #endif
 };
 
@@ -153,6 +162,11 @@ class FloorOpConverter : public UnaryOpConverter {
  public:
   FloorOpConverter() { op_type_ = "floor"; }
 };
+
+class RsqrtOpConverter : public UnaryOpConverter {
+ public:
+  RsqrtOpConverter() { op_type_ = "rsqrt"; }
+};
 class ReciprocalOpConverter : public UnaryOpConverter {
  public:
   ReciprocalOpConverter() { op_type_ = "reciprocal"; }
@@ -184,6 +198,7 @@ REGISTER_TRT_OP_CONVERTER(asinh, AsinhOpConverter);
 REGISTER_TRT_OP_CONVERTER(atanh, AtanhOpConverter);
 REGISTER_TRT_OP_CONVERTER(ceil, CeilOpConverter);
 REGISTER_TRT_OP_CONVERTER(floor, FloorOpConverter);
+REGISTER_TRT_OP_CONVERTER(rsqrt, RsqrtOpConverter);
 REGISTER_TRT_OP_CONVERTER(reciprocal, ReciprocalOpConverter);
 #if IS_TRT_VERSION_GE(7000)
 REGISTER_TRT_OP_CONVERTER(erf, ErfOpConverter);
diff --git a/paddle/fluid/inference/tensorrt/op_teller.cc b/paddle/fluid/inference/tensorrt/op_teller.cc
old mode 100644
new mode 100755
index 22bd172e93b40f773a3e211d32e939f73f2a40a7..0e180cd7d6526947ebdfc959ae17586976216d0c
--- a/paddle/fluid/inference/tensorrt/op_teller.cc
+++ b/paddle/fluid/inference/tensorrt/op_teller.cc
@@ -2310,6 +2310,7 @@ struct SimpleOpTypeSetTeller : public Teller {
       "atanh",
       "ceil",
       "floor",
+      "rsqrt",
       "reciprocal",
       "erf",
       "softmax",
@@ -2438,6 +2439,7 @@ struct SimpleOpTypeSetTeller : public Teller {
       "atanh",
       "ceil",
       "floor",
+      "rsqrt",
       "reciprocal",
       "erf",
       "softmax",
diff --git a/python/paddle/fluid/tests/unittests/ir/inference/test_trt_convert_unary.py b/python/paddle/fluid/tests/unittests/ir/inference/test_trt_convert_unary.py
index 0928453b0ac341048ae823eb878e3cfed1c55f59..e5c763b822b5560fce5a4c476050eb7fb6f69a84 100644
--- a/python/paddle/fluid/tests/unittests/ir/inference/test_trt_convert_unary.py
+++ b/python/paddle/fluid/tests/unittests/ir/inference/test_trt_convert_unary.py
@@ -31,16 +31,14 @@ class TrtConvertActivationTest(TrtLayerAutoScanTest):
         self.trt_param.workspace_size = 1073741824
 
         def generate_input1(dims, batch, attrs: List[Dict[str, Any]]):
-            if dims == 1:
-                return np.random.random([32]).astype(np.float32)
-            elif dims == 2:
+            if dims == 2:
                 return np.random.random([3, 32]).astype(np.float32)
             elif dims == 3:
                 return np.random.random([3, 32, 32]).astype(np.float32)
             else:
                 return np.random.random([batch, 3, 32, 32]).astype(np.float32)
 
-        for dims in [1, 2, 3, 4]:
+        for dims in [2, 3, 4]:
             for batch in [1, 4]:
                 for op_type in [
                     "exp",
@@ -59,6 +57,7 @@ class TrtConvertActivationTest(TrtLayerAutoScanTest):
                     "atanh",
                     "ceil",
                     "floor",
+                    "rsqrt",
                     "reciprocal",
                 ]:
                     self.dims = dims
@@ -135,7 +134,7 @@ class TrtConvertActivationTest(TrtLayerAutoScanTest):
         self.trt_param.precision = paddle_infer.PrecisionType.Float32
         yield self.create_inference_config(), generate_trt_nodes_num(
             attrs, False
-        ), 1e-5
+        ), 1e-4
         self.trt_param.precision = paddle_infer.PrecisionType.Half
         yield self.create_inference_config(), generate_trt_nodes_num(
             attrs, False
@@ -146,7 +145,7 @@ class TrtConvertActivationTest(TrtLayerAutoScanTest):
         self.trt_param.precision = paddle_infer.PrecisionType.Float32
         yield self.create_inference_config(), generate_trt_nodes_num(
             attrs, True
-        ), 1e-5
+        ), 1e-4
         self.trt_param.precision = paddle_infer.PrecisionType.Half
         yield self.create_inference_config(), generate_trt_nodes_num(
             attrs, True